MYMOFIZGZYHOMD-UHFFFAOYSA-N oxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 14.VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16.239000011574 phosphorus Substances 0.000 claims abstract description 32.OAICVXFJPJFONN-UHFFFAOYSA-N phosphorus Chemical compound OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 32.229910052698 phosphorus Inorganic materials 0.000 claims abstract description 34.238000009792 diffusion process Methods 0.000 claims abstract description 60.238000004519 manufacturing process Methods 0.000 title description 12.
238000000034 method Methods 0.000 title claims abstract description 32.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by Pel Chow filed Critical Pel Chow Priority to US06/029,269 priority Critical patent/US4233093A/en Application granted granted Critical Publication of US4233093A publication Critical patent/US4233093A/en Anticipated expiration legal-status Critical Status Expired - Lifetime legal-status Critical Current Links Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Lifetime Application number US06/029,269 Inventor Pel Chow Original Assignee Pel Chow Priority date (The priority date is an assumption and is not a legal conclusion. Google Patents Process for the manufacture of PNP transistors high powerĭownload PDF Info Publication number US4233093A US4233093A US06/029,269 US2926979A US4233093A US 4233093 A US4233093 A US 4233093A US 2926979 A US2926979 A US 2926979A US 4233093 A US4233093 A US 4233093A Authority US United States Prior art keywords wafer phosphorus diffusion base furnace Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US4233093A - Process for the manufacture of PNP transistors high power US4233093A - Process for the manufacture of PNP transistors high power
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